Abstract

Electron-beam testing technique includes photoemissive probing; electrooptic sampling; charge density probing and photoexcitation are analyzed. Among these techniques an ideal contactless probing system is simple, inexpensive to operate and compatible with the existing test equipment. It will not perturb the circuit and would measure electric signals with minimum crosstalk. Experimental results demonstrate that multiple optical test vectors can be input on the periphery of a DUT (device under test) with negligible crosstalk using this technique. The bandwidth of the test system would be compatible with picosecond data pulses and it would not be limited to certain materials. The approach offers increased testability and measurement of the "chip under test".

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