Abstract

Abstract Understanding adhesion mechanisms is one way to address failures in micro-nano devices. In this paper, the adhesion forces of diamond-like carbon film (DLC) and graphene were measured, and the differences between them were compared. The results show that the adhesion forces on the DLC are dependent on the contact time, but this dependence is disrupted by repeated contacts. The impact of repeated contacts is inevitable. With the increase of repeated contacts, the size of the liquid bridge was changed, and the time to reach saturation became shorter. Finally, at low relative humidity (RH), the adhesion behaviors become independent. In contrast, the adhesion forces of graphene had no contact time dependence under each RH. The adhesion forces remained stable at low and medium RH, and the influence of repeated contacts was weak. At high RH, a sudden increase in adhesion forces caused by repeated contacts can be observed. The adhesion behaviors under different RHs are attributed to the size change of the liquid bridge. The results help people understand the adhesion mechanisms and provide some help in solving the failure problem of micro-nano devices.

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