Comparison of a hybrid model to a global model of atmospheric pressure radio-frequency capacitive discharges

Abstract

A one-dimensional hybrid analytical–numerical global model of atmospheric pressure radio-frequency (rf) driven capacitive discharges, previously developed, is compared with a basic global model. A helium feed gas with small admixtures of oxygen is studied. For the hybrid model, the electrical characteristics are calculated analytically as a current-driven homogeneous discharge. The electron power balance is solved analytically to determine a time-varying Maxwellian electron temperature, which oscillates on the rf timescale. Averaging over the rf period yields effective rate coefficients for gas phase activated processes. For the basic global model, the electron temperature is constant in time and the sheath physics is neglected. For both models, the particle balance relations for all species are integrated numerically to determine the equilibrium discharge parameters. Variations of discharge parameters with composition and rf power are determined and compared. The rate coefficients for electron-activated processes are strongly temperature dependent, leading to significantly larger neutral and charged particle densities for the hybrid model. For small devices, finite sheath widths limit the operating regimes to low O2 fractions. This is captured by the hybrid model but cannot be predicted from the basic global model.