Similar Papers

Paper Title
Journal
Date
Author
Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings
Jie Liu ... Gaoliang Dai
Nanotechnology | VOL. 32
Jie Liu, et. al.Jie Liu ... Gaoliang Dai
05 Feb 2021
Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography
Zhaohui Tang ... Tongbao Li
Optik | VOL. 279
Zhaohui Tang, et. al.Zhaohui Tang ... Tongbao Li
01 Mar 2023
Plasmonic nanostructures made from aluminum fabricated by EUV interference lithography
Y Ekinci ... J F Löffler
-
Y Ekinci, et. al.Y Ekinci ... J F Löffler
08 Oct 2007
Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography
Nassir Mojarad ... Yasin Ekinci
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | VOL. 39
Nassir Mojarad, et. al.Nassir Mojarad ... Yasin Ekinci
01 Jul 2021
View more papers

More From: Measurement Science and Technology

Paper Title
Journal
Date
Author
Boundary sample extraction support vector data description: a novel anomaly detection method for large-scale data
Xiaofei Wang ... Qiang Wang
Measurement Science and Technology | VOL. 36
Xiaofei Wang, et. al.Xiaofei Wang ... Qiang Wang
21 Jan 2025
Development of industrial soft sensor based on semi-supervised probabilistic mixture of echo state networks
Xu Li ... Weiming Shao
Measurement Science and Technology | VOL. 36
Xu Li, et. al.Xu Li ... Weiming Shao
20 Jan 2025
Turning tool wear state recognition based on EMDResNeStTime and sequence-global-encoding
Hucheng Zhang ... Tao Xie
Measurement Science and Technology | VOL. 36
Hucheng Zhang, et. al.Hucheng Zhang ... Tao Xie
20 Jan 2025
Precise multi-satellite orbits and geodetic parameters determination using SLR observations to LAGEOS, Etalon and newly launched LARES-2
Kai Shao ... Bin Yi
Measurement Science and Technology | VOL. -
Kai Shao, et. al.Kai Shao ... Bin Yi
20 Jan 2025
View more papers

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.