Abstract
Silver silicon nitride coating were deposited on Ti6Al4V alloy using physical vapor deposition magnetron sputtering technique. Field Emission Spectroscopy (FESEM), Electron Dispersive Spectroscopy (EDS) and X-ray diffraction (XRD) were used to characterize as-deposited and after heat treatment of AgSiN coatings in order to understand the morphology, compositions and structure. Meanwhile, in determining the crystallite size and lattice strain, the simplified Williamson-Hall plot method was utilized. The heat treated coated sample shown to reveal granular surface structure, bigger crystallite size and lattice strain as compared to the as-deposited coated sample.
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