Comparative study of magnetite (Fe3O4) thin films grown by pulsed laser ablation and sputtering

Abstract

Comparative study of magnetite (Fe3O4) thin films grown by pulsed laser ablation (PLD) and radio frequency (RF)-sputtering of α-Fe2O3 target have been investigated. We have found strong correlation between RF power (P) of sputtering and substrate temperature (Ts) of PLD films on their structural and magnetic properties. Films grown at low P and Ts are dominated by antiferromagnetic α-Fe2O3 phase while ferrimagnetic Fe3O4 phase is dominant at high P and Ts Post-annealing in H2/H2O atmosphere at 450 °C, these films show single phase Fe3O4 but RF power and substrate temperature still play a significant role. With increasing P and Ts values, the orientation of Fe3O4 films change from (110) to (111) followed by complete randomizations. These (110) to (111) orientations affect magnetic properties differently above Verwey transition temperature of 120 K. The RF-power and substrate temperature have the same influence on the physical properties of Fe3O4 films, as both are related to thermal energy.