Abstract
In a MEMS based RF switch Cantilever beam is an element that is fixed at one end and free from another side. The electrostatic actuation process occurs on the beam and it will deflect from an original position. As the Electrostatic force increases, the z-component displacement produced in the beam is also increases. The beam is placed at the 2µm height from the ground substrate. The cantilever works as a switch which operates as ON or OFF. When the switch is ON its capacitance increases and when it is OFF its capacitance decreases. When applied actuation voltage reaches to Pull-in-voltage the cantilever connects with the ground electrode. This paper explores the concept of increase in flexibility, switching speed, low power consumption, low actuation voltage and reduction in squeeze film damping. The various types of cantilever switch provide discrete displacement corresponding to actuation voltage. In this paper we simulated the cantilever switch with various shapes. The simulation is done using COMSOL MULTIPHYSICS software.
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