Comparative Study of Perforated RF MEMS Switch

Abstract

Abstract MEMS are the Micro Electronic mechanical system or in general terms it is also known as Micro electronic mechanical switch. MEMS have classified in two types of switch that is series switch and shunt switch .The cantilever is a series type switch whereas the fixed- fixed beam is shunt type switch. Fixed- Fixed beam is the element that is fixed at both anchor ends. The electrostatic actuation process occurs on the switch due to which switch deflects from its original position. The stiction problem occurs in MEMS switches which have been reduced by the proposed design. The perforation is used to reduce the squeeze film damping by decreasing the mass of the switch. As the voltage increases the switch moves to downward z-direction .The displacement is produced in the switch as direction of movement is towards negative z-axis. When the beam contacts with electrode, pull in voltage is achieved. This paper explores the perforation and meander concept with Fixed -fixed switch, which increases the flexibility, low actuation voltage and switching speed. The various types of perforations provide discrete displacement corresponding to voltage. In this paper we represent the design and simulation of Fixed-Fixed switch using perforation of size 2 μm-5 μm. The electrostatic actuation mechanism is applied on the Fixed-fixed switch which has a serpentine meanders and perforation at different voltages. The switch is designed and simulated by using COMSOL®MULTIPHYSICS 4.3b software.