Abstract
ASTRACT We have synthesized P0.3Sr0.7TiO3 (PST30) thin films on platinum and lanthanum aluminate sustrates using chemical solution deposition technique. The films on platinum sustrate were polycrystalline, whereas the film on LAO sustrate was highly (100) oriented. These films were characterized for their structure, surface morphology, and dielectric properties. Dielectric measurements of the films on Pt were carried out using metal-insulator-metal (MIM) structure and that on LAO, using 50 finger inter-digitated electrodes. For high frequency (Ku and) measurements, eight element coupled phase shifters were deposited on the PST film on LAO and the characteristics were evaluated in terms of their phase shift and insertion losses. The figure of merit was found to be ∼ 49°/dB at 15.75 GHz, which is etter than the one otained for pure BST50 film (∼ 33°/dB).
Published Version
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