Comparative performance study of smart structure for thermal microactuators

Abstract

Thermal microactuator is one of earliest types of microactuators. Typical thermal actuators are in the form of Bimorph and Chevron structures. A bimorph thermal actuator has a complex movement direction, in arc motion and thus it is not feasible in the most MEMS designs. While Chevron actuator has a tendency to produce an off-plane movement which lead to low precision in lateral movement. A new thermal actuator design in the form of serpentine structures shows promising feature to have better performances in terms of more predictive lateral movement with smaller off-plane displacement. In MEMS chip design, areas play a critical role as it will impact with the cost of the final product. In this study, four different structures of thermal actuator were simulated using ANSYS v15. Three different set of area sizes which are 240 µm x 1000 µm, 240 µm x 1500 µm and 240 µm x 2000 µm have been analyzed. All four structures were named as Serpentine01, Serpentine02, Bimorph and Chevron. The data with regards to temp...