Abstract
This paper reports on a design, fabrication and demonstration of a reconfigurable metasurface which consists of gold nanograting integrated with a thermal bimorph actuator. An Au/SiO 2 bimorph beam was chosen as both an optical meta-atom and thermal actuator. As the grating consists of alternately arranged movable and static beams, the effective thickness of the grating was decreased by actuation, resulting decrease of optical retardation. The device was fabricated through surface micromachining on a glass substrate. The device was characterized using a rotating analyzer method. Retardation reconfiguration from 86.2° to 78.6° at the wavelength of 532 nm was achieved.
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