Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin polymer films

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AbstractEllipsometry and atomic force microscopy (AFM) were used to study the film thickness of continuous and discontinuous polymer films in the 1–20 nm thickness range on smooth silicon wafers and on structured aluminium substrates. The methods of exploiting AFM for thickness measurements with a high spatial resolution are described.For continuous films, the AFM method is a direct one, i.e. it does not rely on any model. There is excellent agreement between AFM and ellipsometry in the 1–10 nm thickness range. Very small systematic deviations occur in this range but big deviations occur above 10 nm, and are discussed. The film preparation method, spin coating, was characterized to result in prepolymer films with a very homogeneous thickness.Discontinuous films of 2–9 nm thick were also evaluated by both methods of thickness determination. In this case, for one of the AFM approaches a model has to be used too. The agreement between both methods ranged from very good to poor, depending on the kind of sample and on the kind of AFM determination method.