Abstract

Piezoceramic actuators (PCAs) are desired devices in many micro/nano-positioning applications. The performance of PCA-based applications is severely limited by the presence of hysteresis nonlinearity. To remedy the hysteresis nonlinearity in such systems, feedforward hysteresis compensation is the most common technique. In the literature, many different feedforward hysteresis compensation approaches have been developed, but there are no comparative studies of these approaches. Focusing on the modified Prandtl-Ishlinskii model (MPIM) for asymmetric hysteresis description of piezoceramic actuators, three feedforward hysteresis compensation approaches—inverse hysteresis compensation (IHC), without inverse hysteresis compensation (WIHC), and direct inverse hysteresis compensation (DIHC)—are developed and compared in this paper. Extensive comparative experiments were conducted on a PCA-actuated stage to verify the effectiveness of the three different feedforward control approaches to hysteresis compensation. The experimental results show that the performances among the three approaches are rather similar, and the main differences among them are due to the specific implementation of each approach.

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