Abstract
The process of Cu-film compaction on graphene under the action of Ar13 clusters hitting the surface with an energy of 5 eV is studied using the molecular-dynamics method. The horizontal and vertical components of the self-diffusion coefficient of a Cu film and graphene, the stresses on the horizontal Cu area, the Cu-graphene interaction energy, the radial distribution function of the film, and the graphene surface roughness under bombardment of a target by Ar13 clusters are calculated. Graphene exhibits some pliability, and traces of Cu film surface relief remain on it after total exposure under the impacts of Ar13 clusters.
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