Abstract
We present a compact interferometer circuit to extract multiple model parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with fewer measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm.
Highlights
Silicon Photonics is one of the key photonic technologies for large-scale integration
If we could reduce the number of optical measurements for each monitoring circuit, we will significantly reduce the measurement time
To reduce the footprint of test structures and the number of optical measurements for performance evaluation, we present in this paper a two-stage Mach-Zehnder interferometers (MZIs) design, shown in Fig. 1(a), with which we can simultaneously extract effective and group indices of a waveguide mode and the parameters of the used directional couplers (DC)
Summary
Silicon Photonics is one of the key photonic technologies for large-scale integration. We want to link the fabrication variations to performance variations of larger circuits It involves performance evaluation [1], variability modeling [2], yield prediction [3], and optimization of circuits for robustness [4]. The devices or circuits for parameter extraction should be compact so they can be placed at various locations without disturbing the layout of the actual functional circuits, but still allow to construct a granular map of the process variation on the fabricated chips. This serves as input for location-dependent variability analysis and yield prediction of future designs
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