Abstract
A compact form of confocal interference microscope using a single mode HeNe laser is described. Confocal operation is ensured by permitting the image light to re-enter the laser cavity. The confocal signal is detected as a modulation on the lasing power. Interference contrast images with lateral resolution 0.4 μm and height resolution 0.1 nm have been obtained using both dc and modulation feedback techniques.
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