Abstract

To measure surface topography in the subnanometre range a new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call