Abstract
Comments on: “Control of relative etch rates of SiO 2 and Si in plasma etching”
Published Version
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https://doi.org/10.1016/0038-1101(77)90147-2
Journal: Solid State Electronics | Publication Date: May 1, 1977 |
Citations: 3 |
Comments on: “Control of relative etch rates of SiO 2 and Si in plasma etching”
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