Abstract
We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to “convert” different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
