Abstract
A new computational approach to collisional mixing is described. Mixing is treated as a random walk process and the slowing down of recoils is treated separately by computer simulation. The method provides relocation cross sections and profiles, and is particularly suitable for studying various effects in marker broadening and marker shift including the role of various generations of recoils. The influences of the first-, second-, third- and higher-order generations are of same order of magnitude on the marker broadening and the shift. Ion-impurity mixing has only little effect on broadening and shift in the studied cases. The calculated ballistic mixing efficiencies are comparable with the experimentally measured mixing efficiencies. The possibility that mixing could be dominated by collisional mixing is discussed.
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