Abstract
Collection efficiencies of secondary electrons in SEM are analyzed theoretically in the weak electric field limit. Collection efficiency is determined by the amount of secondary electrons which can reach the electron detectors. The effects of the screening of local topographies around the incident points are analyzed in order to calculate this collection efficiency. We constructed a weak electric field limit model based on simple assumptions including (1) straight motion of emitted electrons near the sample surface, (2) complete absorption of once-blocked electrons, (3) full detection of emitted electrons departed from the near neighbor of the sample surface. In some special cases, collection efficiencies are calculated analytically. We generated a few SEM images combining them with a model of the secondary electron yield.
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