Collection and sputtering experiments with noble gas ions

Abstract

The present paper describes experimental work on the collection of noble gas ions of energies 5–65 keV. We have used an electromagnetic isotope separator to measure saturation values in different materials. The dependence of saturation value on different experimental conditions is investigated, e.g. variations with current density, angle of ion beam incidence and target temperature. In order to provide a simple description of the collection process, we have also measured the sputtering ratios for noble gas ions bombarding different materials. Sputtering is discussed in the light of existing theories for which a few improvements are proposed.