Abstract
Abstract The aim of this research is to find a CO 2 sensor with high value of the response to CO 2 concentrations in a range of several hundreds of ppm. The sensor investigated in this work is based on metal/solid electrolyte/insulator/silicon structure with fluorine conducting solid electrolyte LaF 3 layer. It is characterized by rather with short response and recovery time of about 1 min (t 90 ) at room temperature. The application of such gas sensor seems to be very promising for the measurement of CO 2 concentration in a range from atmospheric background (300 ppm) to maximum permissible concentration (2000 ppm).
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