Abstract

Few studies focus on the plastic deformations of inorganic semiconductors because they are usually brittle and do not deform easily. Here, a peculiar internal shear stress originated from the entropy deletion of CO2 in the tunnels of non-van der Waals VO2 crystal, is employed to introduce hierarchical plastic deformations, including dislocations, point vacancies, twins, and amorphous bands. The strength of such stress field increases by more than three orders of magnitude compared to that of external experimental CO2 pressure. We further demonstrate that 2D amorphous structures can be obtained by the synergetic effect of hierarchical deformations in 3D crystal.

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