Abstract
AbstractThin films plasma‐polymerized from tetramethyltin was applied for CO gas sensor device. The films formed from tetramethyltin contains alkyl chains with organic tin moieties, and pyrolysis of them at 350–500°C yields carbonized films with SnO2 moieties. The electrical resistance for the films pyrolized at 350–500°C decreases in exposing to CO gas. The sensitivity, the ratio of the electrical resistance between in air and in CO atmosphere, is enhanced by catalytic actions of palladium chloride, specially in operation at low temperatures below 50°C. The gas sensitivity between CO and other gases such as ethanol, methane, and propane gases is good. The possible determination of CO gas concentration by the sensor device is in ranges from 10 to 1000 ppm.
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