Abstract
The plasma polymerization of manganese acetylacetonate (MnAcAc) was carried out and the deposited plasma films were applied for CO gas sensor devices. The plasma polymerization of MnAcAc brought about the deposition of organic thin-films containing manganese oxides. The plasma films showed p-type-semiconductive properties and the response to CO gas with increases in resistivity. The CO gas sensor devices constructed from a sandwich structure of the plasma film (2000–3000 angstroms) and Pt catalyst layer (10 angstroms) is applicable for practical uses. The sensitivity of the sensor device to CO gas (1000 ppm) was 24.
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