Abstract
Clustered multi-task learning, which aims to leverage the generalization performance over clustered tasks, has shown an outstanding performance in various machine learning applications. In this paper, a clustered multi-task sequence-to-sequence learning (CMSL) for autonomous vehicle systems (AVSs) in large-scale semiconductor fabrications (fab) is proposed, where AVSs are widely used for wafer transfers. Recently, as fabs become larger, the repositioning of idle vehicles to where they may be requested has become a significant challenge because inefficient vehicle balancing leads to transfer delays, resulting in production machine idleness. However, existing vehicle repositioning systems are mainly controlled by human operators, and it is difficult for such systems to guarantee efficiency. Further, we should handle the small data problem, which is insufficient for machine learning because of the irregular time-varying manufacturing environments. The main purpose of this study is to examine CMSL-based predictive control of idle vehicle repositioning to maximize machine utilization. We conducted an experimental evaluation to compare the prediction accuracy of CMSL with existing methods. Further, a case study in a real largescale semiconductor plant, demonstrated that the proposed predictive approach outperforms the existing approaches in terms of transfer efficiency and machine utilization.
Highlights
Over the past 30 years, automated material handling systems (AMHSs) have been widely applied in semiconductor plants to guarantee efficient, safe, and fast transportation of wafers between facilities
This study aims to model and implement a robust vehicle repositioning system using a predictive approach for autonomous vehicle systems in a large-scale semiconductor plant
We set the target to achieve a practical solution for autonomous vehicle systems in largescale semiconductor plants
Summary
Over the past 30 years, automated material handling systems (AMHSs) have been widely applied in semiconductor plants to guarantee efficient, safe, and fast transportation of wafers between facilities. AMHSs prevent particle contamination and increase the tool utilization, resulting in high productivity by reducing the cycle time. Autonomous vehicle systems (AVSs), the latest version of AMHSs, aim to transfer materials using overhead hoist transports (OHTs) that travel along the railways installed on the ceiling of a fab. Optimizing the AVS operation is a significant challenge in a large fab where several hundreds of vehicles travel along the railways with dozens of areas. Idle vehicle repositioning is one of the significant control decisions in AVSs because idle vehicle repositioning affects the unload transfer time (UTT) for idle vehicles moving to the pickup point.
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