Abstract
In order to provide the pull-in voltage, angle and height of two-degree-of-freedom (two-DOF) torsional microactuators, closed-form expressions for the pull-in parameters have been successfully obtained from numerical analysis with new formulation of the microactuator. Force and moment balance equations governing the behaviors of the microactuator are obtained as functions of dimensionless force and moment. Thereafter, a mode equation to easily solve the angle and height of the 2-DOF torsional microactuator is derived. A set of the mode equation and the force balance equation is numerically solved for the height and angle of the two-DOF torsional microactuator. For design convenience, closed-form expressions for the pull-in voltage, angle and height are given as functions of the applied voltage and geometry. The theoretical height and angle are in good agreement with experimental data within an error of 2.6% and 4.3%, respectively. As such, the closed-form expressions as well as the developed theory can be used for design and analysis of two-DOF torsional microactuators.
Published Version
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