Abstract
Composite transparent conductive layers (TCLs) were deposited on the GaP window layer of p-side-up thin-film AlGaInP light-emitting diodes (LEDs) in order to enhance their light-extraction efficiency. The composite TCLs were fabricated from aluminum-doped zinc oxide (AZO) layers grown through atomic-layer deposition and pulsed-laser deposition. The results showed that wet-etching of composite AZO thin films improved the light-extraction efficiency of the corresponding LED devices. The droop efficiencies of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films were 29%, 30%, and 22%, respectively. LEDs with textured composite AZO layers exhibited favorable optoelectronic performance. When the injection current was increased from 20 to 1000 mA, the emission wavelengths of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films shifted by 3, 5, and 3 nm, respectively. The optimum textured composite AZO thin film can not only improve LED performance but also effectively substitute flat TCLs in AlGaInP LED applications.
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