Clear correlations observed between YBa2Cu3O7−δ thin-film properties and GHz microwave resonator performance

Abstract

We have fabricated and measured 5 GHz microstrip resonators from a series of YBa2Cu3O7−δ thin films grown on LaAlO3(001) substrates by in situ laser ablation. We have studied the correlations between unloaded quality factor and various film properties, such as transition temperature, width of transition, critical current density, narrowness of x-ray rocking curve, sharpness of electron channeling pattern, and most important substrate temperature during growth. We found that in general, higher transition temperature, higher critical current density, sharper transition, sharper channeling pattern, and narrower x-ray rocking curve correlate positively with good microwave performance. The best quality factor exists for a narrow growth temperature window (around 800 °C). We also report the dependence of quality factor on device power for each film.