Abstract
In the fabrication of aluminium vacuum chambers of the Taiwan Photon Source (TPS), a cleaning treatment with ozonized water followed machining in an ethanol environment. After cleaning with ozonized water, aluminium samples were analyzed according to Auger electron spectroscopy (AES) and measurement of the thermal outgassing rate and photon-stimulated desorption (PSD). The results showed that cleaning with ozonized water has a superior performance. A thermal outgassing rate q72 ~ 6.4 × 10−12 Pa · m/s after baking and a photon-desorption yield η ~ 2 × 10−5 molecules/photon at an accumulated beam dose 3 × 1021 photons/cm2 were obtained.
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