Quadrupole mass spectrometers. (USSR): A F Kazmin and A E Rafalson, Encykoped Izmereniy Kontrlya Avtomatiz, Energiya 1970, 17–18 (in Russian)

Abstract

The Taiwan Photon Source (TPS) uses high-heat-load (HHL) absorbers to protect downstream ultrahigh-vacuum chambers from overheating. In this work, we propose to use the CuCrZr alloy (ASTM C18150) for the HHL absorber body and the ConFlat® flanges. We use the throughput method to measure the thermal outgassing rate and a helium leak detector to verify the vacuum seal between the CuCrZr alloy and stainless-steel flanges. The measured outgassing rate of the CuCrZr alloy was 5.8×10−10 Pa m/s after 72 h of pumping and decreased to 2.0×10−10 Pa m/s after 100 h of pumping. The leak rate through the vacuum seal between a CuCrZr flange and a stainless-steel flange was less than 1×10−10 Pa m3/s even after mounting and unmounting the flanges ten times and baking them at 250 °C. These results indicate that CuCrZr alloy is suitable for integrating HHL components with ConFlat® CuCrZr flanges for the absorption of the synchrotron radiation generated by the TPS.