Abstract
This paper reports an equivalent circuit model of self‐assembled electret (SAE) micro‐electro‐mechanical systems (MEMS) vibrational energy harvesters (VEHs). For the first time, a detailed equivalent circuit model of the SAE‐MEMS VEH has been implemented on a circuit simulator, considering the device energy diagram. The implemented equivalent circuit model allows analysis of the relationship between output current and SAE properties, device structures, and electrode materials. The validity of the model is confirmed by comparing the measurement and simulation results. Thus, the proposed model would be useful for the design of SAE‐MEMS VEHs. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.
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