Abstract
Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW) based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.
Highlights
Wavelet transform finds its application in many disciplines and fields such as in image processing, water-sound, earthquake detection, biomedicine, mechanical vibration, pronunciation recognition, communication, chemical industry, and torrent analysis [1]
This paper proposes to use substrate materials of small electromechanical coupling coefficient k2 (128∘Y shear LiNbO3) in the manufacture to design the wavelet transform device of surface acoustic wave (SAW) based micro force sensor, which has high accuracy and sensitivity testing precision
As the Morlet wavelet transform of SAW devices is based on formula (3), once all the parameters in (4) are relatively fixed, its center frequency of each scale should be corresponding with the only device
Summary
Wavelet transform finds its application in many disciplines and fields such as in image processing, water-sound, earthquake detection, biomedicine, mechanical vibration, pronunciation recognition, communication, chemical industry, and torrent analysis [1]. The three-axis micro force sensor has been designed by Jungwirth et al with the problem of measurement uncertainty. This paper proposes to use substrate materials of small electromechanical coupling coefficient k2 (128∘Y shear LiNbO3) in the manufacture to design the wavelet transform device of SAW based micro force sensor, which has high accuracy and sensitivity testing precision. Within the scope of effective measurement, the SAW based micro force sensor possesses good linearity, consistency, and repeatability in performance. It uses the piezoelectric properties and the temperature stability of the crystal, as well as the frequency signal instead of the conventional pressure sensor with voltage signal, which makes the signal processing of this device more digital and possesses more stable performances.
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