Abstract

The recent electronics revolution has been fueled by the decades-long trend of exponential growth in circuit performance through device scaling. In current and future technologies, simple device scaling does not result in the same performance improvements. For deeply scaled technologies, optimizing interconnect performance is of equal importance as device performance. Following the International Technology Roadmap for Semiconductors (ITRS) specifications for scaled interconnect, worst-case and even average-case interconnect performance decreases with each technology generation [11]. Because the performance improvement achievable through Moore’s law scaling is bottoming out, new technologies to achieve performance enhancement are being explored. Three-dimensional integration is one such technology. Three-dimensional integration offers several performance improvements for electronic systems. First, 3D integration offers a greater device density for a given footprint area. Essentially, more functionality can be packed into a given area. Second, long, global wires can be replaced with shorter, local wires by exploiting vertical interconnect used to connect device layers. This results in lower power dissipation and shorter timing delays. Finally, a 3D technology permits the integration of heterogeneous technologies. Using a wafer-bonding approach to 3D integration, each device layer is fabricated independently of every other device layer allowing each system to be fabricated in a different technology. Circuits that are part of system-on-a-chip (SOC) applications can be fabricated in the device technology that yields optimal performance and then subsequently integrated together using a 3D integrated technology. Because each subsystem is fabricated in the optimal technology, optimal overall system performance can be achieved. The implication of each benefit of 3D integration on circuit architectures is the subject of this chapter. Section 13.2 describes SOC applications. Section 13.3

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