Abstract
Sensitive and selective chemical sensor based on carrier transfer in metal/NPC/SiO2/p-Si structure with nanoscale metal and nanoporous carbon adsorbed layers were fabricated and studied. It was found that most powerfully and noticeably adsorbed molecules influence on whole injection from p-Si substrate on border traps in SiO2 layer and energy spectrum of trapping centers that lead to changes of sensor electrical characteristics. The most adsorption effect was found in Q-DLTS spectra. Moreover adsorption of the molecules of the different gases (vapor) induced different spectra changes. Physical model of the operating the chemical sensor was proposed and discussed. Got results are indicative of possibility of the fabrication sensitive and selective MIS chemical sensors using for detected of adsorbed molecules the isothermal Q-DLTS as sensing method.
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