Abstract
Damaging processes of crystalline alumina (α-Al 2O 3) near the surface region by gas ion (H +, He +, Ar +, 0.5–5 keV) irradiation at various temperatures were examined by the Auger electron spectroscopy (AES) and reflection high-energy electron diffraction (RHEED). Phenomenological kinetic equations, which took spontaneous thermal recovery and the chemical effect between hydrogen and the target atoms, were derived to explain the RHEED intensity. The present results showed that the surface damage by low-energy inert gas irradiation could be understood simply by the ratio of dpa (displacement per atom) rates due to nuclear stopping. In the case of H + irradiation, on the other hand, electronic excitation and hydrogen accumulation in the matrix with some chemical bonding to the matrix atoms significantly affected the damaging rate, the effects of which were semi-quantitatively extracted.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
