Abstract
We have studied three chemical solutions for cleaning gratings prior to epitaxial growth for distributed feedback laser applications. These chemicals are concentrated and mixed solutions of where . On substrates, the etching rate of solutions was about 2–3 times faster than that of concentrated. The solutions etched the grating structure isotropically and preserved the original grating morphology. However, tended to remove the sharp ridges of the original grating and reduce the distributed feedback effect. We have also found that the solutions are much more effective than in removing carbon contaminants, which could provide nucleation sites for dislocation loops and adversely affect the laser diodes' reliability.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
