Abstract
The development of materials formed from multilayer structures (MLS), with compositional modulation on the nanometre scale, such as semiconductor multiple quantum-well structures (MQW), used as lasers in fibre-optic communications, and metallic MLS such as Co/Cr and Co/W, for use as perpendicular magnetic recording media has led to a need for high spatial resolution chemical analysis techniques. The properties of such materials depends critically on the composition profile across the layers and interfaces. Techniques which can be applied to analysis of MLF in cross-section are energy dispersive X-ray (EDS) or electron energy loss (EELS) analysis using a small probe scanning transmission electron microscope (STEM).A VG HB501 STEM at Oxford, fitted with a windowless EDS detector and an EELS detector has been modified to enable pulse counted digital X-ray and EELS maps (plus bright-field (BF) or annular dark-field (ADF) images) to be collected and stored for post-processing in the Semper image-processing package.
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