Abstract
From 1960s to 1980s many groups in the world actively studied and utilized charged particle activation analysis (CPAA) mainly for absolute determination of B, C, N, and O in high-purity substances, particularly semiconductor materials. Here, after a short historical note on CPAA, works of the author’s group mainly at RIKEN are outlined and then his opinion is shown about how to anticipate on the present shrinking of CPAA.
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