Abstract
The relationship between ion implantation system parameters, charge indications from a system charge sensor and various wheel current measurements, and the yield of devices have been investigated. It is found that beam balanced-charge conditions, as determined by either charge levels on dielectric films or by wheel current measurements, occur at consistent values of flood gun setting. This paper describes the charge control system design, the exploration of several charge measurements to determine effective control variables, and a new closed loop charge control system.
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