Charge collection in submicron CMOS/SOI technology

Abstract

We present experimental measurements of charge collection spectroscopy from high energy ion strikes in submicron CMOS/SOI devices. Due to the specific structure of SOI technology, with symmetrical source and drain junctions, a direct equivalence between upset mechanism and charge collection is established. The bipolar mechanism, responsible for the amplification of the deposited charge is discussed based on 2D device simulations. Based on the experimental data we determine qualitatively the influence of transistor geometry on the bipolar gain. Finally the limits of the usual SEU concepts (LET threshold and cross section) are discussed for scaled devices.