Characterizing the hardness and modulus of thin films using a mechanical properties microprobe

Abstract

A new ultralow load microindentation system has been acquired by the Metals and Ceramics Division of Oak Ridge National Laboratory. The system's spacial resolution and its data acquisition capabilities allow the determination of several mechanical properties from submicrometre volumes of materials, hence the term mechanical properties microprobe. In this paper we demonstrate the ability of such a system to measure the modulus and hardness of an ion-implanted sapphire specimen. The implantation process results in an amorphous surface layer 155 nm thick. The hardness and modulus of the amorphous Al 2O 3 are 10 GPa and 200 GPa respectively. This represents a 60% reduction in hardness and a 50% reduction in modulus compared with the unimplanted material.