Characterizing coupled MEMS resonators with an electrical resonator

Abstract

Rapid development in micro/nano fabrication has enabled the shrinking of MEMS devices and the ability to fabricate them in large arrays. However, process variations and device mismatch have also raised testability issues in the MEMS industry. MEMS resonators have been coupled to simplify the characterization of the fabrication process and device performance using their collective behaviour. Perturbation analysis using eigenvalues can therefore be applied to extract the system matrix of coupled resonators. We propose a new way of perturbation analysis by coupling an electrical resonator to an array of MEMS resonators. The electrical resonator is simple in structure and easy to readout. It can also precisely control the amount of perturbation based on two available techniques. Coupling between MEMS resonators and electrical resonator opens a new window for process characterization, device testing, material characterization, as well as large sensors array actuation.