Abstract
The study of nonlinear oscillation characteristics of MEMS resonator is important, which affects the performance of resonator and other MEMS devices. The MEMS resonator studied in this paper is electrostatic MEMS resonator which composed of DETF and combs. The linear spring constant and nonlinear spring constant of DETF are derived with energy method, and the nonlinear dynamics model is established including nonlinear electrostatic force, damping and nonlinear spring constant. The perturbation analysis and multi-scale method are adapted to analyze the nonlinear model, and the relationship between frequency and oscillation amplitude is established. The numerical simulation results indicate that the width of DETF and damping ratio are increased that can decrease the nonlinearity. At last, the MEMS resonator fabricated with SOG process are tested with method of electrostatic driven and electrostatic detection. The experiment results verify the numerical simulation results.
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