Abstract
Hard coatings of TiN were synthesized on M2 steel by ion-beam-enhanced deposition with various doses of nitrogen ions of energy 80 keV and beam current density 37 μA cm −2. The microhardnesses and wear resistances of the coatings for various ion doses are discussed. The chemical characteristics of the coatings were studied by Auger electron spectroscopy (AES) and AES profiling. In addition, the relation between the microchemical characteristics and the macrophysical properties is also studied in this paper.
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