Abstract
Tin-catalyzed silicon nanowires (SiNWs) were synthesized at various hydrogen gas flow rates using the hydrogen radical-assisted deposition method. Large quantities of SiNWs with various crystal phases were synthesized and their characteristics were estimated. Tin-capped SiNWs were straightly grown and their structures were changed with increasing hydrogen gas flow rates. Their diameters on the bottom side were increased ranging from approximately 50 to 200 nm and their lengths extended up to ~ 2 µm with increasing hydrogen gas flow rates.
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