Abstract
Thin films of flash-evaporated GaP were examined by reflectance-transmittance techniques, spectroscopic ellipsometry in the visible range, grazing-incidence X-ray reflectivity and Auger electron spectroscopy. The interfaces of the film with both the substrate and the atmosphere are oxidized. A multilayer structure is proposed from the ellipsometry data and compared with the results of the X-ray and Auger analyses.
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