Characterization of the thermodynamic cycle of a MEMS-based external combustion resonant engine

Abstract

The thermodynamic cycle of a resonant, MEMS-based, micro heat engine is characterized. The micro heat engine is an external combustion engine made of a cavity encapsulated between two membranes. The cavity is filled with saturated liquid–vapor mixture working fluid. Heat is added to and rejected from the engine at a frequency corresponding to the resonant frequency of the engine. Both pressure–volume and temperature-entropy diagrams are used to investigate the thermodynamic cycle of the resonant micro heat engine. The results show that the working cycle is nearly rectangular in shape and consists of two constant temperature processes and two constant volume processes. We hypothesize that major sources of irreversibility in the engine are heat transfer over finite temperature differences during heat addition and rejection, heat transfer into and out of engine thermal mass, viscous losses due to liquid working fluid motion, and heat escape from the engine to the surroundings. The maximum pressure and volume changes measured inside the engine cavity are 45 Pa and 0.55 mm3, respectively. The results show that for a heat addition of 1 mJ, the engine operates over a very small temperature difference. The small operating temperature difference is mostly attributable to the large thermal storage of the engine structure, the membranes and the wicks. The measured second law efficiency of the micro heat engine is 16 %.