Abstract
ABSTRACTSpectroscopic ellipsometry is one of the most accurate and reliable optical technique to characterize polymers, liquid crystals (LCs) and organic light emitting diodes (OLEDs). Because these devices are formed by complex structure including optical anisotropy, absorbing and graded materials, the correct use of spectroscopic ellipsometer required a combination of the proper choice of hardware and the appropriate ellipsometric model. In this work, we presents ellipsometric results obtained by a commercially available phase modulated spectroscopic ellipsometer (PMSE) on a full TFT-LCD structure characterized from UV to NIR. As expected, strong anisotropy and inhomogeneous optical properties were found respectively on LCs and ITO materials. We also presents measurements of film thickness and optical constants of each layer constituing an OLED structure
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